Rochester,NY 8/29/2009 10:20:17 PM
Axcelis Technologies, Inc.,ACLS-Recently declared business partnership with Ion Beam Services
Axcelis Technologies, Inc
Aug 5, 2009, Axcelis Technologies, Inc. (Nasdaq:ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, recently announced that it has formed a business partnership to offer sales and support for the PULSION plasma immersion ion implanter manufactured by Ion Beam Services (IBS).
IBS, headquartered in Peynier-Rousset, France, developed the PULSION plasma immersion system with proprietary polarization technology and a unique pulsed plasma configuration. The PULSION system achieves high process stability at ultra low energy while offering high dose process versatility at both 200 and 300mm.
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