Nanometrics Inc. - Nanometrics Unifire Recognized of the Recipients for its annual R&D 100 Award
Nanometrics Inc.
Nanometrics, announces that its R&D 100 Award recognizes the 100 most technologically significant products introduced the past year. The company selected as a recipient of the 2009 R&D 100 Award for its Advanced Film Capability (AFC) technology incorporated in the UniFire line of metrology systems.
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"The spectroscopic and small target capability of AFC is of interest to a large number of customers in the semiconductor industry," said Michael Darwin, Vice President of the UniFire Business Group at Nanometrics. "In particular, when AFC is used with the UniFire's state of the art interferometry capability, our customers have a unique capability to measure and combine film thickness with die level topography information for control of advanced CMP, lithography, and etch processes in semiconductor manufacturing."
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